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New Inchwnnn type Actuator m血I/Qh町田dyueInterferometer Feedback白raL nng Stroke P町 田onStage
New Inchwnnn type Actuator m血I/Qh町田dyueInterferometer Feedback白raL nng Stroke P町 田onStage
Detailed Information
- 자료유형
- 기사
- ISSN
- 12298557
- 서명/저자
- New Inchwnnn type Actuator m血I/Qh町田dyueInterferometer Feedback白raL nng Stroke P町 田onStage / ・Clrnmvnn Monn, Sungbo Lee and JK C hung
- 형태사항
- pp. 34
- 모체레코드
- 모체정보확인
- Control Number
- gtec:383940
MARC
008171218s2005 aa kor■022 ▼a12298557
■245 ▼aNew Inchwnnn type Actuator m血I/Qh町田dyueInterferometer Feedback白raL nng Stroke P町 田onStage▼d・Clrnmvnn Monn, Sungbo Lee and JK C hung
■300 ▼app. 34
■7001 ▼a・Clrnmvnn Monn, Sungbo Lee and JK C hung
■773 ▼tInternational Journal of Precision Engineering and Manufacturing▼gv.6 n.2▼d2005, 04
■SIS ▼aKS013119▼b63235▼h1▼sG
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