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PitchM田surementof 150 mn ID grating Standards Using an Nano-me位。logicalAtomic Force Microscope
PitchM田surementof 150 mn ID grating Standards Using an Nano-me位。logicalAtomic Force Microscope
Detailed Information
- Material Type
- 기사
- ISSN
- 12298557
- Title/Author
- PitchM田surementof 150 mn ID grating Standards Using an Nano-me位。logicalAtomic Force Microscope / Jonghan Jin, Jchiko Misumi, Satoshi Gonda and Tomizo Kurosawa
- Material Info
- pp. 19
- Added Entry-Personal Name
- Jonghan Jin, Jchiko Misumi, Satoshi Gonda and Tomizo Kurosawa
- 모체레코드
- 모체정보확인
- Control Number
- gtec:383928
MARC
008171218s2004 aa kor■022 ▼a12298557
■245 ▼aPitchM田surementof 150 mn ID grating Standards Using an Nano-me位。logicalAtomic Force Microscope▼dJonghan Jin, Jchiko Misumi, Satoshi Gonda and Tomizo Kurosawa
■300 ▼app. 19
■7001 ▼aJonghan Jin, Jchiko Misumi, Satoshi Gonda and Tomizo Kurosawa
■773 ▼tInternational Journal of Precision Engineering and Manufacturing▼gv.5 n.3▼d2004, 07
■SIS ▼aKS012158▼b63235▼h1▼sG
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