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Novel Abrasive Free Slicing Mkethod for Si Using Wet Chemical Etching
Novel Abrasive Free Slicing Mkethod for Si Using Wet Chemical Etching
Detailed Information
- 자료유형
- 기사
- ISSN
- 09120289
- 서명/저자
- Novel Abrasive Free Slicing Mkethod for Si Using Wet Chemical Etching / Junji MURATA
- 형태사항
- pp. 837
- 기타저자
- Junji MURATA
- 모체레코드
- 모체정보확인
- Control Number
- gtec:378690
MARC
008171204s2017 aa jpn■022 ▼a09120289
■245 ▼aNovel Abrasive Free Slicing Mkethod for Si Using Wet Chemical Etching▼dJunji MURATA
■300 ▼app. 837
■7001 ▼aJunji MURATA
■773 ▼t精密工學會誌(日) : 정밀공학회지▼gv.83 n.9▼d2017, 09
■SIS ▼aKS035920▼b63119▼h3▼sG
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