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스퍼터 조건에 따른 코발트계 박막의 불균일성 (2)
스퍼터 조건에 따른 코발트계 박막의 불균일성 (2) / 정인섭
스퍼터 조건에 따른 코발트계 박막의 불균일성 (2)

Detailed Information

자료유형  
 기사
ISSN  
17388228
서명/저자  
스퍼터 조건에 따른 코발트계 박막의 불균일성 (2) / 정인섭
형태사항  
pp. 1426
기타저자  
정인섭
기본자료저록  
대한금속ㆍ재료학회지 : v.31 n.11 1993, 11
모체레코드  
모체정보확인
Control Number  
gtec:361185

MARC

 008171102s1993                                        aa    jpn
■022    ▼a17388228
■245    ▼a스퍼터  조건에  따른  코발트계  박막의  불균일성  (2)▼d정인섭  
■300    ▼app.  1426
■7001  ▼a정인섭
■773    ▼t대한금속ㆍ재료학회지▼gv.31  n.11▼d1993,  11
■SIS    ▼aKS007284▼b63212▼h3▼sG

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