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저온화학증착에 의한 TiN 막의 접착력에 관한 연구
저온화학증착에 의한 TiN 막의 접착력에 관한 연구 / 이정중
저온화학증착에 의한 TiN 막의 접착력에 관한 연구

Detailed Information

자료유형  
 기사
ISSN  
17388228
서명/저자  
저온화학증착에 의한 TiN 막의 접착력에 관한 연구 / 이정중
형태사항  
pp. 1083
기타저자  
이정중
기본자료저록  
대한금속ㆍ재료학회지 : v.33 n.8 1995, 08
모체레코드  
모체정보확인
Control Number  
gtec:359541

MARC

 008171101s1995                                        aa    jpn
■022    ▼a17388228
■245    ▼a저온화학증착에  의한  TiN  막의  접착력에  관한  연구▼d이정중
■300    ▼app.  1083
■7001  ▼a이정중
■773    ▼t대한금속ㆍ재료학회지▼gv.33  n.8▼d1995,  08
■SIS    ▼aKS035390▼b63212▼h4▼sG

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