서브메뉴
검색
반도체 제조에 있어서의 압력계(Pressure Gauges in Semi-conductor Manufacturing)
반도체 제조에 있어서의 압력계(Pressure Gauges in Semi-conductor Manufacturing)
Detailed Information
- Material Type
- 기사
- ISSN
- 12271772
- Title/Author
- 반도체 제조에 있어서의 압력계(Pressure Gauges in Semi-conductor Manufacturing) / 田中徹(Toru Tanaka) ; 山田哲靖(Tetsuyasu Yamada)
- Material Info
- pp. 70
- Added Entry-Personal Name
- 田中徹(Toru Tanaka)
- Added Entry-Personal Name
- 山田哲靖(Tetsuyasu Yamada)
- Host Item Entry
- 자동제어계측 : v.17 n.2 2004, 02
- 모체레코드
- 모체정보확인
- Control Number
- gtec:356279
MARC
008171025s2004 a a kor■022 ▼a12271772
■245 ▼a반도체 제조에 있어서의 압력계(Pressure Gauges in Semi-conductor Manufacturing)▼d 田中徹(Toru Tanaka) ▼e山田哲靖(Tetsuyasu Yamada)
■300 ▼app. 70
■7001 ▼a田中徹(Toru Tanaka)
■7001 ▼a山田哲靖(Tetsuyasu Yamada)
■773 ▼t자동제어계측▼gv.17 n.2▼d2004, 02
■SIS ▼aKS011488▼b63138▼h3▼sG
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Book Loan Request Service
- My Folder
