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Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing
Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufac...
Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing

Detailed Information

자료유형  
 기사
ISSN  
10871357
서명/저자  
Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing / Yuan, C.Y
기타저자  
Yuan, C.Y
기본자료저록  
Journal of Manufacturing Science and Engineering : v.132 n.3 2010, 06
모체레코드  
모체정보확인
Control Number  
gtec:345990

MARC

 008171013s2010              a    a                          eng
■022    ▼a10871357
■245    ▼aIntegrated  Sustainability  Analysis  of  Atomic  Layer  Deposition  for  Microelectronics  Manufacturing▼dYuan,  C.Y
■7001  ▼aYuan,  C.Y
■773    ▼tJournal  of  Manufacturing  Science  and  Engineering▼gv.132  n.3▼d2010,  06
■SIS    ▼aKS022699▼b63162▼h3▼sG

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