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Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
상세정보
- 자료유형
- 기사
- ISSN
- 10871357
- 서명/저자
- Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM) / Virwani, K.R
- 기타저자
- Virwani, K.R
- 모체레코드
- 모체정보확인
- Control Number
- gtec:345987
MARC
008171013s2010 a a eng■022 ▼a10871357
■245 ▼aPulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)▼dVirwani, K.R
■7001 ▼aVirwani, K.R
■773 ▼tJournal of Manufacturing Science and Engineering▼gv.132 n.3▼d2010, 06
■SIS ▼aKS022699▼b63162▼h3▼sG
