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Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
Detailed Information
- Material Type
- 기사
- ISSN
- 10871357
- Title/Author
- Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics / Riveros, R.E
- Added Entry-Personal Name
- Riveros, R.E
- 모체레코드
- 모체정보확인
- Control Number
- gtec:345865
MARC
008171013s2012 a a eng■022 ▼a10871357
■245 ▼aMagnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics▼dRiveros, R.E
■7001 ▼aRiveros, R.E
■773 ▼tJournal of Manufacturing Science and Engineering▼gv.134 n.5▼d2012, 10
■SIS ▼aKS026698▼b63162▼h3▼sG
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