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Error Modeling of a Parallel Wedge Precision Positioning Stage
Error Modeling of a Parallel Wedge Precision Positioning Stage
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MARC
008171013s2012 a a eng■022 ▼a10871357
■245 ▼aError Modeling of a Parallel Wedge Precision Positioning Stage▼dZeng, Q
■7001 ▼aZeng, Q
■773 ▼tJournal of Manufacturing Science and Engineering▼gv.134 n.6▼d2012, 12
■SIS ▼aKS026885▼b63162▼h3▼sG


