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Force Modeling and Control of SiC Monocrystal Wafer Processing
Force Modeling and Control of SiC Monocrystal Wafer Processing / Li, Shujuan
Force Modeling and Control of SiC Monocrystal Wafer Processing

Detailed Information

자료유형  
 기사
ISSN  
10871357
서명/저자  
Force Modeling and Control of SiC Monocrystal Wafer Processing / Li, Shujuan
형태사항  
pp. 061003
기타저자  
Li, Shujuan
기본자료저록  
Journal of Manufacturing Science and Engineering : v.137 n.6 2015, 12
모체레코드  
모체정보확인
Control Number  
gtec:345624

MARC

 008171012s2015              a    a                          eng
■022    ▼a10871357
■245    ▼aForce  Modeling  and  Control  of  SiC  Monocrystal  Wafer  Processing▼dLi,  Shujuan
■300    ▼app.  061003
■7001  ▼aLi,  Shujuan
■773    ▼tJournal  of  Manufacturing  Science  and  Engineering▼gv.137  n.6▼d2015,  12
■SIS    ▼aKS032251▼b63162▼h3▼sG

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