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The Effect of AI Interlayers on the Growth of AIN on Si substrates by Metal Organic Chemical Bapor Deposition
The Effect of AI Interlayers on the Growth of AIN on Si substrates by Metal Organic Chemical Bapor Deposition
상세정보
- 자료유형
- 기사
- ISSN
- 17388090
- 서명/저자
- The Effect of AI Interlayers on the Growth of AIN on Si substrates by Metal Organic Chemical Bapor Deposition / Xun Wang ; Haiqiang Li
- 형태사항
- pp. 1069
- 기타저자
- Xun Wang
- 기타저자
- Haiqiang Li
- 모체레코드
- 모체정보확인
- Control Number
- gtec:287522
MARC
008141119s2014 a a eng■022 ▼a17388090
■245 ▼aThe Effect of AI Interlayers on the Growth of AIN on Si substrates by Metal Organic Chemical Bapor Deposition▼dXun Wang▼eHaiqiang Li
■300 ▼app. 1069
■7001 ▼aXun Wang
■7001 ▼aHaiqiang Li
■773 ▼tElectronic Materials Letters▼gv.10 n.6▼d2014, 11
■SIS ▼aKS029661▼b63247▼h3▼sG
