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Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition
Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition
상세정보
- 자료유형
- 기사
- ISSN
- 17388090
- 서명/저자
- Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition / Xun Wang ; Haiqiang Li
- 형태사항
- pp. 1063
- 기타저자
- Binh Tinh Tran
- 기타저자
- Kung-Liang Lin
- 모체레코드
- 모체정보확인
- Control Number
- gtec:287521
MARC
008141119s2014 a a eng■022 ▼a17388090
■245 ▼aEffect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition▼dXun Wang▼eHaiqiang Li
■300 ▼app. 1063
■7001 ▼aBinh Tinh Tran
■7001 ▼aKung-Liang Lin
■773 ▼tElectronic Materials Letters▼gv.10 n.6▼d2014, 11
■SIS ▼aKS029661▼b63247▼h3▼sG
