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Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition
Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition
Detailed Information
- Material Type
- 기사
- ISSN
- 17388090
- Title/Author
- Effect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition / Xun Wang ; Haiqiang Li
- Material Info
- pp. 1063
- Added Entry-Personal Name
- Binh Tinh Tran
- Added Entry-Personal Name
- Kung-Liang Lin
- Host Item Entry
- Electronic Materials Letters : v.10 n.6 2014, 11
- 모체레코드
- 모체정보확인
- Control Number
- gtec:287521
MARC
008141119s2014 a a eng■022 ▼a17388090
■245 ▼aEffect of AI Interlayers on the Growth of AIN on Si Substrates by Metal Organic Chemical Vapor Deposition▼dXun Wang▼eHaiqiang Li
■300 ▼app. 1063
■7001 ▼aBinh Tinh Tran
■7001 ▼aKung-Liang Lin
■773 ▼tElectronic Materials Letters▼gv.10 n.6▼d2014, 11
■SIS ▼aKS029661▼b63247▼h3▼sG
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