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眞空蒸着
眞空蒸着 / S.Schiller, U.Heisig공저. =
眞空蒸着

Detailed Information

Material Type  
 단행본
UDC  
621.793.1
DDC  
671.7 S774眞-23
Callnumber  
671.7 S774眞
Author  
S.Schiller, U.Heisig공저.
Title/Author  
眞空蒸着 / S.Schiller, U.Heisig공저. =
Publish Info  
동경 : アグネ, 1988
Material Info  
144 : 삽도 ; 22
General Note  
진공증착
Price Info  
￦
Control Number  
gtec:1138

MARC

 008941005s1988        ja  a      00a  K  o            jpn
■0801  ▼a621.793.1
■082    ▼a671.7▼bS774眞▼223
■090    ▼a671.7▼bS774眞
■1001  ▼aS.Schiller,  U.Heisig공저.
■24510▼a眞空蒸着▼dS.Schiller,  U.Heisig공저.▼x
■260    ▼a동경▼bアグネ▼c1988
■300    ▼a144▼b삽도▼c22
■500    ▼a진공증착
■950    ▼b￦

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    • 蒸着技術の用途…1
    • 蒸着の特徵…4
    • 蒸着技術の基礎…6
    • 蒸氣流および基板…31
    • 蒸發源の槪說…40
    • 蒸着膜におけるパタ_ンの形成…60
    • 基板の前處理…82
    • 薄膜形成の制御…99
    • 蒸着裝置の使樣…126

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